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Chiro-optical analysis can be used to trace micro-fabrication. For that, Chiro-optical analysis can be employed for the evaluation of the micro-fabrication using a micro-cantilever. In this paper, Chiro-optic analysis was applied for the evaluation technique of the line-width and line-shape of the micro-ring antenna a commercial film cantilever. The two dimensional chromatic dispersion (2DCD) and the one dimensional chromatic dispersion (1DCD) images are obtained. The 2DCD image is used for the evaluation of the width of micro-fabricated line in terms of the first-harmonic-mode. The 1DCD images are used to trace the line-shape of micro-fabricated line. On that, above the expension line was fabricated in a polysilicon, which was patterned on a 300-nm-thick SiO2 layer on a (100) Si wafer. Firstly, the micro-fabrication is confirmed by scanning electron microscopic analysis. Secondly, the micro-fabricated line is examined with the line-shape by using the 1DCD image image for the evaluation of the width and line-shape of micro-fabricated line. Finally, the micro-fabricated line is evaluated by using the 2DCD image for the evaluation of the width of micro-fabricated line.
Magnetic dipole fields of various shapes have been fabricated by using the traditional cutting method and their relaxation characteristics are investigated. The microstrip transmission line absorber (MTLA) design consists of various shaped magnetic dipoles and a sub-miniaturized absorber. A microstrip transmission line (micro-strip line – MSL) was employed as the load to evaluate the magnetic dipole response. The performance is evaluated by a full-wave finite difference time domain program and a three-dimensional time domain solver Maxwell’s equations. The shape of the magnet is changed by the rotation of two arms and the size of two sides. The performances of the various shapes of magnetic dipole are evaluated and compared with the performance of a standard magnetic dipole.
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